Chillers – SEMI Standard Chiller
HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. Both the pump and compressor rotations are inverter controlled for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®.
HRZ-F, SEMI Standard Double Inverter Chiller, for Fluorinated Coolant
HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. Both the pump and compressor rotations are inverter controlled for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®.
- Cooling capacities: 2kW, 4kW, 8kW, 10kW
- Circulating Fluid: Fluorinert™ or GALDEN® (see catalog for compatibility)
- Temperature range setting: -10 to 90°C (2kW), -20 to 90°C (4, 8, 10kW)
- Note: Temperature range depends on fluorinated fluid choice
- Temperature stability: ±0.1°C
- Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz
- Standards: CE, UL, RoHS, SEMI S2, S8, F47
HRZ-F, SEMI Standard Double Inverter Chiller, for Ethylene Glycol Coolant
HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. Both the pump and compressor rotations are inverter controlled for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with a 60% ethylene glycol aqueous solution for the coolant.
- Cooling capacities: 2kW, 4kW, 8kW, 10kW
- Circulating Fluid: 60% ethylene glycol aqueous solution
- Temperature range setting: -10 to 90°C (2kW), -20 to 90°C (4, 8, 10kW)
- Temperature stability: ±0.1°C
- Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz
- Standards: CE, UL, RoHS, SEMI S2, S8, F47
HRZ-F, SEMI Standard Double Inverter Chiller, for Tap or DI Water Coolant
HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. Both the pump and compressor rotations are inverter controlled for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with tap water or deionized water for the coolant.
- Cooling capacities: 2kW, 4kW, 8kW, 10kW
- Circulating Fluid: tap water or DI water
- Temperature range setting: 10 to 60°C
- Temperature stability: ±0.1°C
- Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz
- Standards: CE, UL, RoHS, SEMI S2, S8, F47
HRZ-F, SEMI Standard Pump Inverter Chiller, for Fluorinated Coolant
HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. This model includes inverter control of the pump rotations for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®.
- Cooling capacities: 8kW
- Circulating Fluid: Fluorinert™ or GALDEN® (see catalog for compatibility)
- Temperature range setting: -20 to 40°C
- Temperature stability: ±0.1°C
- Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz
- Standards: CE, UL, RoHS, SEMI S2, S8, F47
HRZ-F, SEMI Standard Pump Inverter Chiller, for Tap or DI Water Coolant
HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. This model includes inverter control of the pump rotations for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with a 60% ethylene glycol aqueous solution for the coolant.
- Cooling capacities: 8kW
- Circulating Fluid: 60% ethylene glycol aqueous solution
- Temperature range setting: -20 to 40°C
- Temperature stability: ±0.1°C
- Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz
- Standards: CE, UL, RoHS, SEMI S2, S8, F47