XGTP, Parallel Seal Slit Valve for High Vacuum

Series XGTP slit valve functions as a portal between chambers of semiconductor equipment.  Typical positions include between the transfer chamber and load lock chamber, or transfer and process chambers.  The XGTP has been designed for easier maintenance, including easy access to replace the actuator bellows or the gate.  Low particle generation and a 3 million cycle sevice life support high productivity of the semiconductor tools.

  • Window sized for 300mm wafers
  • End lock holds gate opened or closed during emergency stop
  • Insert or cassette type (standard, half MESK) valves
  • FKM or Kalrez® 4079 gate seal materials
  • Optional position sensor and connectors
  • Various made to order options available
XGTP, Parallel Seal Slit Valve for High Vacuum
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Select values from the drop down lists or make appropriate selections to configure the part number.
Valve Type Configuration Status
Gate O-ring Material Configuration Status
Auto Switch & Connector Configuration Status
End Lock Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.


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