XLJ, Vacuum Angle Valve w/Release Valve

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

  • Compatible with inert gases
  • Flange sizes: 25 and 40
  • Operating pressure range: Atmospheric to 0.01 Pa
  • Operating temperature: 5-40°C
  • Voltage options: (100, 110, 200, 220, 230, 240)VAC; (12, 24)VDC
XLJ, Vacuum Angle Valve w/Release Valve
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